SUBSTRATE PROCESSING APPARATUS, PROGRAM, AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide technique for suppressing the decrease of substrate processing efficiency and reducing damage caused in a substrate stored in the inside by opening a hermetic container.SOLUTION: A substrate processing apparatus 1 comprises: a hermetic container 11 having a space which stores a substrate 9 in the inside thereof and an opening 121 formed which carries in or carries out the substrate 9; an opening/closing mechanism 17 which opens or closes the opening 121; a substrate processing section 30 which performs cleaning processing to the substrate 9; and a first conveyance robot IR 1 which carries the substrate 9 in/out of the hermetic container 11. Furthermore, the substrate processing apparatus 1 has a schedule creation section 401 which creates schedule data 441 defining a timing at which the opening/closing mechanism 17 opens/closes the opening 121 and a timing at which a substrate conveyance section 20 carries in the substrate 9 from the hermetic container 11 or carries the substrate 9 out of the hermetic container 11, in accordance to the processing time for the substrate 9 in the substrate processing section 30.