发明名称 SUB-10 NM GRAPHENE NANORIBBON LATTICES
摘要 A graphene lattice comprising an ordered array of graphene nanoribbons is provided in which each graphene nanoribbon in the ordered array has a width that is less than 10 nm. The graphene lattice including the ordered array of graphene nanoribbons is formed by utilizing a layer of porous anodized alumina as a template which includes dense alumina portions and adjacent amorphous alumina portions. The amorphous alumina portions are removed and the remaining dense alumina portions which have an ordered lattice arrangement are employed as an etch mask. After removing the amorphous alumina portions, each dense alumina portion has a width which is also less than 10 nm.
申请公布号 US2014048764(A1) 申请公布日期 2014.02.20
申请号 US201213607688 申请日期 2012.09.08
申请人 DIMITRAKOPOULOS CHRISTOS D.;FRANKLIN AARON D.;SMITH JOSHUA T.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DIMITRAKOPOULOS CHRISTOS D.;FRANKLIN AARON D.;SMITH JOSHUA T.
分类号 H01L29/06;B82Y99/00 主分类号 H01L29/06
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