| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply that is suitable for a plasma generation device, has a simple configuration and enables a plasma to be efficiently generated.SOLUTION: A power supply 10 for supplying a power to a plasma reactor 20 being a load includes: a transformer 12; and a plurality of SIDACs 13 connected in series between the transformer 12 and the plasma reactor 20. The power supply 10 may further includes a switch 14 for switching the number of the SIDACs 13 connected in series between the transformer 12 and the plasma reactor 20. |
