| 摘要 |
A mirror apparatus includes beams that support a mirror portion therebetween, the mirror portion having a mirror on a surface thereof, and drives the beams in a torsional direction to cause the mirror portion to oscillate at a predetermined resonance frequency, wherein thermally deformable materials that deform due to heating are provided on surfaces of the beams, and a spring constant of the beams is adjusted such that thermal deformations of the thermally deformable materials cause the mirror portion to oscillate at the predetermined resonance frequency. |
