| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures.SOLUTION: The device includes: a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state; and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally included is a procedure sequencer; when the human operator ready input is in the second state, the procedure sequencer sequences the fully automated procedures until the human operator ready input is placed into the first state; and when the human operator ready input is placed in the first state, the procedure sequencer begins sequencing the manual assistance procedures after reaching a safe termination point for the fully automated procedures being performed. |
