发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a structure in which parasitic capacitance between wirings can be sufficiently reduced.SOLUTION: In a thin film transistor having a bottom gate structure which uses an oxide semiconductor layer, an oxide insulating layer is formed so as to serve as a channel protection layer in contact on a part of the oxide semiconductor layer overlapping with a gate electrode layer, and an oxide insulating layer is formed so as to cover a peripheral portion (including a side surface) of the stacked oxide semiconductor layer when forming the oxide insulating layer. A source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protecting layer. A structure is provided so that an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer. |
申请公布号 |
JP2014033211(A) |
申请公布日期 |
2014.02.20 |
申请号 |
JP20130187174 |
申请日期 |
2013.09.10 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;HOSOHANE MIYUKI;SAKATA JUNICHIRO;KUWABARA HIDEAKI |
分类号 |
H01L29/786;G02F1/1368;H01L21/336;H01L51/50 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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