发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a structure in which parasitic capacitance between wirings can be sufficiently reduced.SOLUTION: In a thin film transistor having a bottom gate structure which uses an oxide semiconductor layer, an oxide insulating layer is formed so as to serve as a channel protection layer in contact on a part of the oxide semiconductor layer overlapping with a gate electrode layer, and an oxide insulating layer is formed so as to cover a peripheral portion (including a side surface) of the stacked oxide semiconductor layer when forming the oxide insulating layer. A source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protecting layer. A structure is provided so that an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer.
申请公布号 JP2014033211(A) 申请公布日期 2014.02.20
申请号 JP20130187174 申请日期 2013.09.10
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;HOSOHANE MIYUKI;SAKATA JUNICHIRO;KUWABARA HIDEAKI
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L51/50 主分类号 H01L29/786
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