| 摘要 |
PURPOSE: Cluster equipment for processing a substrate reduces an equipment footprint on the basis of the same output by processing a substrate in a batch type. CONSTITUTION: An equipment front end module (100) includes a load port (110) in which a cassette (C) is loaded or unloaded and a substrate transfer robot (130) drawing out a substrate from the cassette. A first load lock chamber (200) is connected to the equipment front end module through a gate valve (GV1). A transfer chamber (300) is connected to the first load lock chamber through a gate valve (GV2). The transfer chamber includes a substrate transfer robot (330) to transfer the substrate. A process processing module (400) is connected to the transfer chamber through a gate valve (GV3). |
