| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of parallel shift operation of multiple reactors.SOLUTION: A method of parallel shift operation of multiple reactors includes: (i) continuously supplying n gases numbered 1 to n simultaneously to n gas ports via n main gas lines, respectively, at a constant flow rate, one of branch gas lines of each main gas line being in an open state so that the inflow rates of the respective reactors are equal, and the outflow rates of the respective reactors are equal; and (ii) while maintaining the inflow rates and the outflow rates of the respective reactors, simultaneously closing the one of the branch gas lines of each main gas line in the open state and opening another one of the branch gas lines of each main gas line so that different numbered gases are continuously supplied in parallel to the respective reactors without changing the inflow rates and the outflow rates of the reactors. |
