SELF-ALIGNED THIN FILM TRANSISTOR WITH DOPING BARRIER AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a self-aligned thin film transistor with a doping barrier for controlling the diffusion level of a doping barrier using the doping barrier in a thin film transistor having a self-alignment structure and a manufacturing method thereof. A self-aligned thin film transistor with a doping barrier includes an active layer formed on a substrate and having a first doping region, a second doping region and a channel region, a gate insulating layer formed on the channel region, a gate electrode formed on the gate insulating layer, a doping source layer formed on the first and the second doping region, a doping barrier formed between the doping source and the first and the second doping region.