| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass spectroscope device with raised controllability of an addition amount of water molecules which can reduce device contamination and avoid enlarging and complicating the device, and moreover, to provide a mass spectroscope device using an irradiation device which can emit both primary ions and particles for water molecule addition.SOLUTION: A mass spectroscope device, which irradiates a sample with primary ions to perform mass spectrometry of secondary ions emitted from the sample, includes a chamber for placing the sample, irradiation means for irradiating the sample with particles, and an extraction electrode for guiding the secondary ions emitted from the sample to mass spectrometry means. The irradiation means is means for switching between a first mode of radiating the primary ions for emitting the secondary ions from the sample and a second mode of emitting particles containing water molecules to be adhered to the sample, thereby irradiating the sample with the particles. |
