发明名称 PIEZOELECTRIC LAMINATE, SURFACE ACOUSTIC WAVE ELEMENT, THIN FILM PIEZOELECTRIC RESONATOR, AND A PIEZOELECTRIC ACTUATOR
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric laminate formed on a substrate with a piezoelectric layer composed of potassium sodium niobate.SOLUTION: A piezoelectric laminate 100 includes a substrate 1 and a first piezoelectric layer 3 composed of potassium sodium niobate formed above the substrate 1. The first piezoelectric layer 3 is represented by a composition formula (KNa)NbO, where 0.1<a<1 and 1&le;x&le;1.2.
申请公布号 JP2014033210(A) 申请公布日期 2014.02.20
申请号 JP20130187080 申请日期 2013.09.10
申请人 SEIKO EPSON CORP 发明人 UENO MAYUMI;HIGUCHI AMAMITSU;KIJIMA TAKESHI
分类号 H01L41/187;B41J2/045;B41J2/055;B41J2/135;B41J2/14;H01L21/314;H01L41/047;H01L41/09;H01L41/18;H01L41/317;H01L41/318;H01L41/319;H01L41/39;H01L41/43;H03H9/145;H03H9/17;H03H9/25;H03H9/64 主分类号 H01L41/187
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