发明名称 DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a display device which decreases variations in the luminance of light-emitting elements among pixels caused by variations in the characteristics of TFTs and which has high reliability and excellent picture qualities.SOLUTION: A plurality of TFTs, at least two TFTs to be connected to a light-emitting element are disposed; and crystallinity in a semiconductor region which forms an active layer of each TFT is controlled to be different from others. The semiconductor regions are prepared by crystallizing an amorphous semiconductor film by laser annealing. In order to give different properties of crystallinity, a method for changing scanning directions of a continuous oscillation laser beam is applied to obtain different directions of the crystal growth. Otherwise, with the same scanning direction of the continuous oscillation laser beam, such a method is applied that the longitudinal directions of the channels of the TFTs are changed between the individual semiconductor regions, and thereby, the direction of the crystal growth is controlled to be different from a current direction.
申请公布号 JP2014033219(A) 申请公布日期 2014.02.20
申请号 JP20130198604 申请日期 2013.09.25
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;ARAI YASUYUKI
分类号 H01L21/336;H01L21/20;H01L29/786;H01L51/50 主分类号 H01L21/336
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