发明名称 Strained Structure of a Semiconductor Device
摘要 A semiconductor device comprises a substrate comprising a major surface; a p-type Field Effect Transistor (pFET) comprising: a P-gate stack over the major surface, a P-strained region in the substrate adjacent to one side of the P-gate stack, wherein a lattice constant of the P-strained region is different from a lattice constant of the substrate, wherein the P-strained region has a first top surface higher than the major surface; and a P-silicide region on the P-strained region; and an n-type Field Effect Transistor (nFET) comprising: an N-gate stack over the major surface, an N-strained region in the substrate adjacent to one side of the N-gate stack, wherein a lattice constant of the N-strained region is different from a lattice constant of the substrate, wherein the N-strained region has a second top surface lower than the major surface and a N-silicide region on the N-strained region.
申请公布号 US2014048888(A1) 申请公布日期 2014.02.20
申请号 US201213588860 申请日期 2012.08.17
申请人 CHEN CHUNG-HSIEN;KO TING-CHU;CHANG CHIH-HAO;CHANG CHIH-SHENG;CHANG SHOU-ZEN;WANN CLEMENT HSINGJEN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHEN CHUNG-HSIEN;KO TING-CHU;CHANG CHIH-HAO;CHANG CHIH-SHENG;CHANG SHOU-ZEN;WANN CLEMENT HSINGJEN
分类号 H01L27/092;H01L21/20 主分类号 H01L27/092
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