发明名称 INLINE SYSTEM
摘要 An inline system including a first apparatus having a first processing unit for processing a workpiece and an unloading area for unloading the workpiece processed by the first processing unit, a second apparatus having a loading area for loading the workpiece unloaded from the unloading area and a second processing unit for processing the workpiece loaded to the loading area, a transfer unit for transferring the workpiece from the unloading area to the loading area, and a position detecting unit for imaging the unloading area to detect the position of the unloading area and also imaging the loading area to detect the position of the loading area. The transfer unit transfers the workpiece from the unloading area to the loading area according to the position of the unloading area and the position of the loading area detected by the position detecting unit.
申请公布号 US2014050552(A1) 申请公布日期 2014.02.20
申请号 US201313959816 申请日期 2013.08.06
申请人 DISCO CORPORATION 发明人 SEKIYA KAZUMA
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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