发明名称 STACKED MICROELECTRONIC ASSEMBLY WITH TSVS FORMED IN STAGES WITH PLURAL ACTIVE CHIPS
摘要 A microelectronic assembly is provided in which first and second electrically conductive pads exposed at front surfaces of first and second microelectronic elements, respectively, are juxtaposed, each of the microelectronic elements embodying active semiconductor devices. An electrically conductive element may extend within a first opening extending from a rear surface of the first microelectronic element towards the front surface thereof, within a second opening extending from the first opening towards the front surface of the first microelectronic element, and within a third opening extending through at least one of the first and second pads to contact the first and second pads. Interior surfaces of the first and second openings may extend in first and second directions relative to the front surface of the first microelectronic element, respectively, to define a substantial angle.
申请公布号 US2014048954(A1) 申请公布日期 2014.02.20
申请号 US201314060997 申请日期 2013.10.23
申请人 TESSERA, INC. 发明人 OGANESIAN VAGE;HABA BELGACEM;MOHAMMED ILYAS;MITCHELL CRAIG;SAVALIA PIYUSH
分类号 H01L25/00 主分类号 H01L25/00
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