METHOD OF PERFORMING EDX IN A CHARGED–PARTICLE MICROSCOPE

摘要

In order to overcome disadvantages in EDX (Energy Dispersive X-ray) methodologies, a method and a charged particle microscope for performing the method involve using the results of a relatively fast pre-scan to pre-set an optimal value of a chosen input beam parameter, such as beam current, before beginning the acquisition of a matrix of x-ray spectra for a sample.