PLASMA GENERATION DEVICE, CVD DEVICE AND PLASMA TREATMENT PARTICLE GENERATION DIVICE

摘要

The present invention provides a plasma generation apparatus that, even when a source gas is supplied into a housing where an electrode cell is arranged, does not cause a problem of corrosion of a power feed part and an electrode surface arranged in the housing and a problem of deposition of a metal in a place within the housing other than a discharge part of the electrode cell. A plasma generation apparatus (100) according to the present invention includes an electrode cell and a housing (16) that encloses the electrode cell. The electrode cell includes a first electrode (3), a second electrode (1) facing the first electrode (3) with interposition of a discharge space (6) therebetween, and dielectrics (2a, 2b) arranged on main surfaces of the electrodes (1, 3). The plasma generation apparatus (100) further includes a pipe passage (75) configured to directly supply a source gas from the outside of the housing (16) to the discharge space (6) without being connected to a space within the housing (16) where the electrode cell is not arranged.