| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal airflow sensor having high flow measurement accuracy.SOLUTION: A thermal air flow sensor has a measurement element. The measurement element has: a semiconductor substrate; an electric insulator that includes a heating resistor and temperature measuring resistor, which are formed by accumulating thin films on the semiconductor substrate, and a silicon oxide film; and a diaphragm section that is formed by removing part of the semiconductor substrate and on which the heating resistor and temperature measuring resistor are formed. In the thermal air flow sensor, the ratio of an area occupied by the thin films to the area of the measurement element is 40-60%. |
