发明名称 METHOD FOR OPTICAL TRANSMISSION OF A STRUCTURE INTO A RECORDING MEDIUM
摘要 The invention relates to a method for optical transmission of a structure into a recording medium which can be transformed locally from a first undefined state into a second defined state by irradiating with photons from a photon source. The two states of the recording medium are manifested in different physical and/or chemical properties of the recording medium. According to the invention at least one photon source having a photon flux of less than 104 photons per second is selected for the irradiation with the photons. It was recognised that with such a low photon flux especially fine structures can advantageously be transmitted into the recording medium without the irradiation having to be partially blocked by a mask. In this manner, for a given wavelength (energy) of the photons, structures can be transmitted that are considerably smaller than the width, defined by the diffraction limit, of the probability distribution for the locations at which the emitted photons are incident.
申请公布号 WO2014026662(A2) 申请公布日期 2014.02.20
申请号 WO2013DE00377 申请日期 2013.07.12
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 HARDTDEGEN, HILDE;MIKULICZ, MARTIN
分类号 G03F7/20 主分类号 G03F7/20
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