Method for determining surface shape of measured object, involves covering measurement object surface partially with measuring film and carrying out measurement process to target surface covered with measuring film

摘要

The method involves covering a measurement object surface partially with a measuring film (14) and measuring a film structure. A measurement process is carried out on a target surface covered with the measuring film. Electromagnetic radiation (13a) is radiated on a measuring film using an irradiating process. The electromagnetic radiation is partially and diffusely scattered on the measuring film. The measuring film is pressed based on pressure difference between two spaces adjacent to the measuring film. An independent claim is also included for a system for determining a surface shape of a measured object.