发明名称 SILICON INGOT CUTTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a silicon ingot cutting apparatus capable of more reliably preventing edge chipping and cracking which occur at the time of cutting a silicon ingot.SOLUTION: A silicon ingot cutting apparatus 100 cuts a columnar silicon ingot 1 placed on a slicing table 2 into tabular blocks 11 with the use of a cutting blade 3. The silicon ingot cutting apparatus 100 has pressing means 5 which presses, from the opposite side of the slicing table 2, the silicon ingot 1 and the tabular blocks 11 to be cut from the silicon ingot 1, when the cutting blade 3 cuts a cutting end portion of the silicon ingot 1.
申请公布号 JP2014033023(A) 申请公布日期 2014.02.20
申请号 JP20120171363 申请日期 2012.08.01
申请人 MITSUBISHI MATERIALS CORP 发明人 MATSUDA ATSUSHI;KOYANAGI OSAMU;TAKAHATA KOTA
分类号 H01L21/304;B24B27/06;B28D5/04 主分类号 H01L21/304
代理机构 代理人
主权项
地址