发明名称 |
SILICON INGOT CUTTING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a silicon ingot cutting apparatus capable of more reliably preventing edge chipping and cracking which occur at the time of cutting a silicon ingot.SOLUTION: A silicon ingot cutting apparatus 100 cuts a columnar silicon ingot 1 placed on a slicing table 2 into tabular blocks 11 with the use of a cutting blade 3. The silicon ingot cutting apparatus 100 has pressing means 5 which presses, from the opposite side of the slicing table 2, the silicon ingot 1 and the tabular blocks 11 to be cut from the silicon ingot 1, when the cutting blade 3 cuts a cutting end portion of the silicon ingot 1. |
申请公布号 |
JP2014033023(A) |
申请公布日期 |
2014.02.20 |
申请号 |
JP20120171363 |
申请日期 |
2012.08.01 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
MATSUDA ATSUSHI;KOYANAGI OSAMU;TAKAHATA KOTA |
分类号 |
H01L21/304;B24B27/06;B28D5/04 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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