发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a small chip area.SOLUTION: In a semiconductor chip 1, an annular seal ring SR1 is formed along the outer periphery of a semiconductor substrate 2, and an annular seal ring SR2 is formed along the inner side of the seal ring SR1. The seal rings SR1 and SR2 are used as a power-supply line VL1 and a ground line GL1 for an internal circuit 3, respectively. For this reason, the chip area can be reduced as compared to a conventional configuration in which the power-supply line VL1 and the ground line GL1 are separately provided from the seal rings SR.
申请公布号 JP2014033064(A) 申请公布日期 2014.02.20
申请号 JP20120172545 申请日期 2012.08.03
申请人 RENESAS ELECTRONICS CORP 发明人 OKADA YOSHINORI;ARAKI KEIRYO;SUZUKI YUTAKA;UEDA TOSHIHIRO;OKAZAKI YUJI;OIKAWA MIZUO;KOZONO KAZUHIKO;OHASHI HIROTO;MATSUOKA NORIKAZU
分类号 H01L21/822;H01L21/3205;H01L21/768;H01L21/82;H01L23/522;H01L27/04 主分类号 H01L21/822
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