Magnet assembly for eddy current damper of projection exposure system, has magnets that are arranged on magnetic assembly side region of supporting plate which is provided with two sub-panels

摘要

The magnet assembly (10) has several magnets (13-16) that are arranged on a magnetic assembly side region of a supporting plate (12). The supporting plate is provided with two sub-panels (18,19) which are arranged in a direction transverse to the magnetic assembly side region. The two sub-panels are made of same material. The thickness ranges of the sub-panels are set different from each other. An independent claim is included for a method for assembling magnets on supporting plate for formation of magnet assembly.