| 摘要 |
The present invention relates to a method for manufacturing a retainer ring of a chemical and mechanical polishing apparatus which suggests a mold structure which facilitates first molding of an inner ring member having no warpage of circumference and inner crack during molding the retainer ring formed with the inner ring member and an outer skin member and second molding of the outer skin member having excellent adhesion and flatness and no shrinkage and crack on the outside of the inner ring member, and to a manufacturing mold thereof. The method for manufacturing the retainer ring comprises the steps of: preparing an inner ring member lower mold; preparing an inner ring member upper mold; molding the inner ring member; preparing an outer skin member lower mold; preparing an outer skin member upper mold; installing the inner ring member in a wedge type; molding the outer skin member; and molding tab grooves. |
