| 摘要 |
PROBLEM TO BE SOLVED: To reduce a manufacturing cost of a semiconductor device comprising a chemical sensor or to perform detection with high accuracy by a plurality of measuring principles.SOLUTION: A semiconductor device comprises a first sensor element and a second sensor element, where the first sensor element comprises a first conductive layer and a first sensitive film formed on the first conductive layer, and the second sensor element comprises a second conductive layer different from the first conductive layer and a second sensitive film formed on the second conductive layer. A method for manufacturing a sensor element comprises: a process (a) for forming the conductive layers of the sensor element in a semiconductor substrate or on the semiconductor substrate; and a process (b) for forming the sensitive films by discharging liquid including a component constituting the sensitive films by an ink jet device on the conductive layers. |
