| 摘要 |
PROBLEM TO BE SOLVED: To provide a patterning method for obtaining a high accuracy pattern with high throughput, and to provide a dispenser.SOLUTION: The patterning method includes a step for grouping the uneven pattern of a template into a plurality of groups according to the difference of pattern size, and a step for discharging a liquid imprint resist, by using a nozzle of relatively small nozzle diameter, to a region on a substrate where the uneven pattern of a group having a relatively small pattern size is aligned out of a plurality of groups, and discharging a liquid imprint resist, by using a nozzle of relatively large nozzle diameter, to other region on a substrate where the uneven pattern of a group having a relatively large pattern size is aligned out of a plurality of groups. |
