| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave discharge device capable of controlling the bulk and shape of atmospheric pressure plasma.SOLUTION: The microwave discharge device includes: a dielectric substrate 2; a microstrip line 6 formed on one surface 4 of the dielectric substrate 2; and a conductor 10 formed on the other surface 8 of the dielectric substrate 2. At the end of the microstrip line 6, a stable discharge electrode 28 that generates atmospheric pressure plasma between the conductor 10 and the same using the microwave, and at a point between the stable discharge electrode 28 and the conductor 10, an ignition electrode 30 is disposed. |
