| 摘要 |
A method (112) of forming a sensor panel (146) that includes an array (144) of sensor structures (22, 24) encapsulated in a mold material (148) and forming a controller panel (158) that includes an array (156) of controller dies (26) encapsulated in a mold material (160). The arrays (144, 156) are arranged so that locations of the sensor structures (22, 24) correspond with locations of the controller dies (26). The controller panel (158) is bonded (162) to the sensor panel (146) to form a stacked panel structure (164). After bonding, methodology (112) entails forming (178) conductive elements (84) on the controller dies (26), removing (174) material sections (126, 142, 168) from the controller panel 158 and the sensor panel (146) to expose bond pads (42, 58), forming (178) electrical interconnects (80), applying (182) packaging material (90), and singulating (196) the stacked panel structure (164) to produce sensor packages (20, 104). |
