发明名称 SPUTTERING TARGET AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE INCLUDING BLACK MATRIX DEPOSITED THEREBY
摘要 A sputtering target and an organic light-emitting display device including a black matrix deposited thereby. The sputtering target is used in a sputtering process for depositing a black matrix in an organic light-emitting display device. The sputtering target has a cermet structure in which a metal and a metal oxide are mixed.
申请公布号 US2014048782(A1) 申请公布日期 2014.02.20
申请号 US201313962102 申请日期 2013.08.08
申请人 SAMSUNG CORNING PRECISION MATERIALS CO., LTD. 发明人 HAN JIN WOO;KIM EUI SOO;PARK SEUNG WON;SOHN INSUNG;SHIN YOU MIN
分类号 C23C14/06;H01L51/52 主分类号 C23C14/06
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