| 摘要 |
A gate valve and a vacuum processing device having the same are disclosed. The gate valve according to an embodiment of the present invention includes a valve chamber placed on one side of a first vacuum chamber; a first blade placed on a first opening unit, which is connected to an opening unit of the first vacuum chamber, of the valve chamber, opening the first opening unit, and having a groove one side facing the fist opening; a plate-shaped sealing member having a plate shape, partially inserted into the groove, and closing the first opening unit when the first blade is placed on the first opening unit, and multiple residual air removing locking members for removing residual air in the groove and locking the plate-shaped sealing member to the groove area. |
