发明名称 Shower head cleaning and packing apparatus
摘要 Disclosed is a shower head washing and packing apparatus for simultaneously washing and vacuum-packaging the shower head. Disclosed shower head washing and packing apparatus comprise a washing chamber having a washing unit that injects a washing gas from the outside to a shower head and washes the shower head; a packaging chamber having a vacuum packing unit for vacuum-packing a washed shower head; a transfer unit transferring the washed shower head from a washing chamber to the packing chamber; a chamber separation door separating the washing chamber and the packing chamber, closing when the shower head is washed in the washing chamber, and opening when the shower head washed by the transfer unit is transferred from the washing chamber to the packing chamber.
申请公布号 KR101365245(B1) 申请公布日期 2014.02.19
申请号 KR20120053866 申请日期 2012.05.21
申请人 发明人
分类号 H01L21/02;H01L21/205;H01L21/3065 主分类号 H01L21/02
代理机构 代理人
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