发明名称 |
CANISTER, VAPOR DEPOSITION APPARATUS HAVING THE SAME, METHOD FOR FORMING THIN FILM USING THE SAME AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS |
摘要 |
<p>To efficiently proceed with a deposition process and easily improve a characteristic of a deposition film, the present invention provides a canister comprising a receiving part for receiving a liquid raw material; a discharging part having a discharging pipe formed to be connected to the receiving part so that a vaporized gas raw material can be discharged after the liquid raw material is vaporized; a blocking member formed to be connected to the upper surface of the receiving part in the receiving part; a partition part which is arranged in the receiving part and has a plurality of partitions arranged to be spaced from each other; and a restriction part which is arranged between the partition part and the blocking member and has a body member connected to the inner surface of the receiving part, an extension member extended from the body member, and a penetration part formed to penetrate the body member and the extension member.</p> |
申请公布号 |
KR20140020678(A) |
申请公布日期 |
2014.02.19 |
申请号 |
KR20120087994 |
申请日期 |
2012.08.10 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
JANG, CHOEL MIN;HUH, MYUNG SOO;JUNG, SUK WON;LEE, SUNG YONG;JO, CHEOL RAE;KIM, IN KYO;KEY, SUNG HUN |
分类号 |
H01L51/56;C23C16/44 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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