Verfahren zum fehlerfreien fotografischen UEbertragen

摘要

1334377 Photographic process LICENTIA PATENT-VERWALTUNGS GmbH 26 Nov 1970 [2 Dec 1969] 56260/70 Heading G2C A developable image is formed in a photosensitive layer on a substrate using an original pattern comprising a plurality of like individual structures arranged in a regular array on a member or on each of a plurality of members, by exposing the layer successively at least 3 times, each successive exposure being to different individual structures of the array for an insufficient time to produce a developable image. The process is used in semiconductor and printed circuit manufacture to obviate faults in the original pattern.