METHODS OF FORMING ORGANIC/INORGANIC HYBRID GELS AND METHODS OF FORMING DIELECTRIC LAYER

摘要

A production method of hybrid gel is disclosed. The production method of the hybrid gel comprises the following steps: producing silica sol by a sol-gel process using a Si precursor; dissolving melamine in a solvent to obtain a melamine resin solution; and mixing the silica sol with the melamine resin solution. The hybrid gel does not generate the phase separation between organic and inorganic components, can produce a dielectric layer having low dielectric constant and excellent mechanical properties.