| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect a focal point with a pixel having a photoelectric conversion part divided into two, and to further improve focal point detection accuracy. <P>SOLUTION: This solid-state imaging element is provided with a plurality of two-dimensionally arranged pixels on a substrate 51. Each of partial pixels 20H has a first photoelectric conversion part 42 and a second photoelectric conversion part 43 respectively present in one-side region and the other-side region divided by a division line in a plan view viewed from the normal direction of the substrate 51, and respectively subjecting incident light to photoelectric conversion. A space 91 is formed on interlayer films 56-58 formed on the substrate 51 along the division line in the plan view. A space 71 is formed between a semiconductor region constituting the photoelectric conversion part 42 and a semiconductor region constituting the photoelectric conversion part 43. <P>COPYRIGHT: (C)2009,JPO&INPIT |
