| 摘要 |
The present invention can prevent the collapse of a convex form unit when an object to be treated, on which an inorganic layer and a metal layer are laminated, is treated. A liquid processing device comprising a body unit (Wi) and a plurality of convex form units (Wm) formed on the body unit (Wi) treats an object (W) to be treated, on which inorganic layer and metal layer are laminated. The liquid processing device comprises: a support unit (50) supporting the body unit (Wi) of an object (W) to be treated; a hydrophobized liquid proving device (30) providing hydrophobized liquid for the object (W) to be treated supported by the supporter (50); and a rinse liquid proving unit (22) providing rinse liquid for the object (W) to be treated in which hydrophobized liquid is provided by the hydrophobized liquid proving device (30). The the hydrophobized liquid proving device (30) comprises: a first hydrophobized liquid proving unit (32) providing a first hydrophobized liquid for the object (W) to be treated to hydrophobize the inorganic layer and a second hydrophobized liquid providing unit (37) providing a second hydrophobized liquid for the object (W) to be treated to hydrophobize the metal layer. |
