| 摘要 |
PURPOSE: A device for drawing out boat trays and a carbon nanotube manufacturing device equipped with the device are provided to rapidly perform a boat tray replacing operation without the risk of operators although the chamber space of a reaction furnace is insufficiently cooled. CONSTITUTION: A device (1) for drawing out boat trays is applied to manufacture carbon nanotubes using a reaction furnace. The reaction furnace synthesizes carbon nanotubes on a boat tray (30) by chemical-depositing gas injected into a high temperature chamber space. The device is driven by a controller which controls the high temperature atmosphere and gas injection of the reaction furnace. The device draws out a boat tray by entering the boat tray the chamber space through one end part of the reaction furnace or draws in a boat tray from the outside of the reaction furnace into the chamber space. [Reference numerals] (AA) Output control signals; (BB) Gas; (CC,DD) Input control signals |
