| 发明名称 |
Symmetric VHF plasma power coupler with active uniformity steering |
| 摘要 |
A coaxial VHF power coupler includes conductive element inside a hollow cylindrical outer conductor of the power coupler and surrounding an axial section of a hollow cylindrical inner conductor of the power coupler. Respective plural motor drives contacting the hollow cylindrical outer conductor are connected to respective locations of the movable conductive element. |
| 申请公布号 |
US8652297(B2) |
申请公布日期 |
2014.02.18 |
| 申请号 |
US201113050481 |
申请日期 |
2011.03.17 |
| 申请人 |
COLLINS KENNETH S.;CHEN ZHIGANG;RAMASWAMY KARTIK;CARDUCCI JAMES D.;RAUF SHAHID;NGUYEN ANDREW;APPLIED MATERIALS, INC. |
发明人 |
COLLINS KENNETH S.;CHEN ZHIGANG;RAMASWAMY KARTIK;CARDUCCI JAMES D.;RAUF SHAHID;NGUYEN ANDREW |
| 分类号 |
C23C16/00;C23F1/00;H01J7/24;H01L21/306;H05B31/26 |
主分类号 |
C23C16/00 |
| 代理机构 |
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