摘要 |
A vibration plate assembly (10) is formed by attaching a piezoelectric element (12) to a diaphragm (11), with an intermediate plate (13) interposed therebetween. A blower chamber plate (40) has a circular opening (40S) in a center thereof. A blower chamber (BS) formed by the diaphragm (11), a flow path plate (50), and the opening (40S) of the blower chamber plate (40) is sized to allow internal pressure to be substantially uniformly changed by vibration of the diaphragm. The blower chamber plate (40) and the flow path plate (50) are provided with an outlet (40BH) and an outlet (50BH), respectively. Compressive fluid pressurized in the blower chamber BS is blown out through the outlets (40BH and 50BH). |