METHOD OF FABRICATING SUSPENDED STRUCTURE FOR REDUCING THE THERMAL ISOLATION

摘要

The present invention relates to a method for manufacturing a floating structure for reducing thermal isolation, including the following steps of: forming a cavity; patterning at least one conductive thin film on a portion of the bottom of the cavity; and bonding the top side of a main substrate with a glass substrate; patterning at least one peripheral anchor on a lower part of the main substrate, to provide a moving route for an element comprising the floating structure and the heat generated from the element. [Reference numerals] (AA) Original heat transfer route; (BB) Additional heat transfer route