发明名称 |
Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices |
摘要 |
A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument. |
申请公布号 |
US8651048(B2) |
申请公布日期 |
2014.02.18 |
申请号 |
US201113090123 |
申请日期 |
2011.04.19 |
申请人 |
VERBECK GUIDO FRIDOLIN;DAVILA STEPHEN;UNIVERSITY OF NORTH TEXAS |
发明人 |
VERBECK GUIDO FRIDOLIN;DAVILA STEPHEN |
分类号 |
C23C14/34;C23C14/22;C23C14/46;C23C14/48 |
主分类号 |
C23C14/34 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|