发明名称 Semiconductor memory devices and methods of fabricating the same
摘要 Provided are semiconductor memory devices and the methods of fabricating the same. The method may include forming a plurality of diode patterns in each of a plurality of first trenches, each of the plurality of first trenches including at least two active regions, the plurality of diode patterns occupying a plurality of spaces, treating the plurality of diode patterns to form a plurality of semiconductor patterns in each of the plurality of spaces, removing portions of the plurality of semiconductor patterns to form a recess in each of the plurality of spaces, treating the of the plurality of semiconductor patterns to form a plurality of diodes in each of the plurality of spaces, forming a bottom electrode on each of the plurality of diodes, forming a plurality of memory elements on each of the bottom electrodes, and forming a plurality of upper interconnection lines on the plurality of memory elements.
申请公布号 US8652897(B2) 申请公布日期 2014.02.18
申请号 US201113337999 申请日期 2011.12.27
申请人 KIM YOUNGKUK;JEON INSANG;KIM YOUNGSEOK;PARK YOUNG-LIM;AN HO-KYUN;SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM YOUNGKUK;JEON INSANG;KIM YOUNGSEOK;PARK YOUNG-LIM;AN HO-KYUN
分类号 H01L21/8238 主分类号 H01L21/8238
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