发明名称 Method, phase grating and device for analyzing a wave surface of a light beam
摘要 The application relates to a method for analyzing the wave surface of a light beam from a source to the focus of a lens. The beam illuminates a sample on the analysis plane and having a defect. A diffraction grating of the plane is a conjugate of an analysis plane through a focal system. An image is formed in a plane at a distance from the grating plane and analyzed by processing means. The invention encodes this grating by a phase function resulting from the multiplication of two phase functions, a first exclusion function defining a meshing of useful zones transmitting the beam to be analyzed in the form of light pencil beams, and a second phase fundamental function which creates a phase opposition between two light pencil beams coming out of adjacent meshes of the exclusion grating.
申请公布号 US8654348(B2) 申请公布日期 2014.02.18
申请号 US20090426994 申请日期 2009.04.21
申请人 PRIMOT JEROME;TOULON BRUNO;GUERINEAU NICOLAS;VELGHE SABRINA;HAIDAR RIAD;OFFICE NATIONAL D'ETUDES ET DE RECHERCHES AEROSPATIALES (ONERA) 发明人 PRIMOT JEROME;TOULON BRUNO;GUERINEAU NICOLAS;VELGHE SABRINA;HAIDAR RIAD
分类号 G01B9/02 主分类号 G01B9/02
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