Method for creating and packaging three dimensional stacks of biochips containing microelectro-mechanical systems

摘要

Systems and methods of the present disclosure provide for three-dimensional stacks of microelectromechanical (MEMS) systems, such as sensors. The stacks may be encapsulated and sealed, and can be positioned within biological tissue, for example to monitor biological signals within the volume of the sensor, provide stimulating signals to a brain, and so forth.