| 发明名称 |
Organic graded spin on BARC compositions for high NA lithography |
| 摘要 |
An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer. |
| 申请公布号 |
US8652762(B2) |
申请公布日期 |
2014.02.18 |
| 申请号 |
US201213423838 |
申请日期 |
2012.03.19 |
| 申请人 |
GOLDFARB DARIO L.;VYKLICKY LIBOR;BURNS SEAN D.;MEDEIROS DAVID R.;SANDERS DANIEL P.;ALLEN ROBERT D.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GOLDFARB DARIO L.;VYKLICKY LIBOR;BURNS SEAN D.;MEDEIROS DAVID R.;SANDERS DANIEL P.;ALLEN ROBERT D. |
| 分类号 |
H01L21/312;G03F7/38;H01L29/02 |
主分类号 |
H01L21/312 |
| 代理机构 |
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代理人 |
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| 地址 |
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