发明名称 Method for manufecturing nano-structure, nano-structure and device using the same
摘要 PURPOSE: A production method of nanostructure is provided to efficiently produce a nanostructure with a three dimensional form which has multidirectional property and a high fitness ratio by growing nanorods at a low temperature and atmospheric pressure using a substrate on which spherical particles are arranged. CONSTITUTION: A production method of nanostructure contains the following steps; (a) spherical particles (102) are arrange on a substrate (101); (b) a metal see layer (103) is formed on the spherical particles; (c) a metal oxide layer (104) is formed by treating the substrate, on which the metal seed layer is formed, with heat; and (d) multiple nanorods (105) are grown immersing the substrate, on which the metal oxide layer is formed, into a aqueous growth solution. The spherical particles are removed as the substrate with the metal seed layer is treated with heat. A heat treatment temperature of the substrate with the metal seed layer is 200-600 degree C. The aqueous growth solution is a solution in which metallic salt precursors and a metal ion containment agent are dispersed in a solvent. A temperature of the aqueous growth solution is 70-100 degreeC. The nanostructure is produced in atmospheric pressure.
申请公布号 KR101363683(B1) 申请公布日期 2014.02.17
申请号 KR20120006859 申请日期 2012.01.20
申请人 发明人
分类号 B82B1/00;B82B3/00 主分类号 B82B1/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利