| 摘要 |
The present invention relates to a high purity GeH4 generating method and a high purity GeH4 generating apparatus. The GeH4 generating method according to the present invention comprises: a synthesis step which produces a first aqueous solution by successively dissolving KOH of solid state, NaBH4 of solid state and GeO2 of solid state in distilled water, and then produces crude GeH4 of gas state containing impurities by slowly putting the first aqueous solution in a state in which an H2SO4 aqueous solution is put in a reactor and by making the first aqueous solution react; a first refining step which removes H2O, which is impurities of condensation water shape, by cooling the crude GeH4 at a predetermined temperature and removes impurities containing H2O, CO2, and Ge2H6 by using absorbents; and a second refining step which produces GeH4 without impurities by performing a distillation process according to the difference of boiling temperatures on the crude GeH4 passing through the first refining step and removing H2 and Ge2H6 which are impurities. According to the present invention, high purity GeH4 is produced and high recovery rate is exhibited. [Reference numerals] (112) First mixing tank;(114) Second mixing tank (H2SO4 tank);(116) Main reactor;(122) Gas compressor;(124) Gas chiller;(126) Adsorber;(127) Heater;(128) Distillation column;(129,133) Vaporizer;(132) Storing tank;(136) Vacuum pump |
