发明名称 DEVICE FOR FORMING THIN LAYER AND MANUFACTURING METHOD OF ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME
摘要 <p>Provided are a thin film forming apparatus for mass-producing a large substrate and an organic light emitting display device using the same. The thin film forming apparatus includes a container, a multiple nozzle part, and a pulse generator. The container stores a thin film forming material. The multiple nozzle part is located on the upper side of a substrate, is connected to the container, receives the thin film forming material, and includes a plurality of nozzles which are arranged in parallel with a preset distance. The pulse generator controls the discharge of the thin film forming material by supplying an instantaneous potential difference between the substrate and at least one nozzle among the nozzles by applying a switching voltage to the substrate or the multiple nozzle part.</p>
申请公布号 KR20140019625(A) 申请公布日期 2014.02.17
申请号 KR20120085987 申请日期 2012.08.06
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 LEE, SANG JO;CHO, SUNG HWAN
分类号 H01L51/56 主分类号 H01L51/56
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