发明名称 |
APPARATUS FOR AUTOMATICALLY FORMING MICRO BEAD SUBSTRATE |
摘要 |
An apparatus for automatically forming a micro bead substrate includes: a substrate fixing unit for fixing a substrate which has a predetermined pattern on its surface; a micro bead supply unit for supplying micro beads; a work unit for picking the micro bead provided by the micro bead supply unit and moving to a location which the substrate is located and performing removal of the remaining micro beads on the substrate except for the micro beads existing on the predetermined pattern in a process of rubbing operation for the surface of the substrate which has the predetermined pattern to flow the micro beads in and inserting the micro beads; a bead removal unit for removing the micro beads which are attached to the work unit to remove the micro beads remaining on the substrate except for the predetermined pattern; and a controller for controlling a transfer unit which transfers the work unit among the micro bead supply unit, fixing unit and micro bead removal unit, and operation of the work unit and transfer unit. |
申请公布号 |
KR101364261(B1) |
申请公布日期 |
2014.02.17 |
申请号 |
KR20130011849 |
申请日期 |
2013.02.01 |
申请人 |
SOGANG UNIVERSITY RESEARCH FOUNDATION |
发明人 |
YOON, KYUNG BYUNG;LEE, CHEOL SOO;NGUYEN NGUYEN KHANH;EOM, SANG AH;LEE, GYEONG BOK |
分类号 |
H01L31/18;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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