HEATER AND METHOD FOR MANUFACTURING THE SAME

摘要

The present invention relates to a heater and a method for manufacturing the same. More particularly, the present invention relates to a heater (100) fixed on the inner part of an isolation part surrounding a chamber in a batch-type substrate heating apparatus. The heater (100) includes a plurality of bending parts (110) alternately arranged and connected to each other and a plurality of heating parts (120). The bending part (110) is a wire shape. The heating part (120) is a flat shape.